Axcelis Technologies, Inc.

Item 7.01. Regulation FD Disclosure. On November 2, 2026, Axcelis Technologies, Inc., a Delaware corporation (“Axcelis” or the “Company”), issued a press release announcing the changes to the closing timeline described in Item 8.01 of this Current Report on Form 8-K. A copy of the press release is attached hereto as Exhibit 99.1 and is incorporated herein by reference.

Item 8.01. Other Events. As previously announced, on September 30, 2025, Axcelis entered into an Agreement and Plan of Merger (the “Merger Agreement”), by and among Axcelis, Victory Merger Sub, Inc., a Delaware corporation and a direct wholly owned subsidiary of Axcelis (“Merger Sub”), and Veeco Instruments Inc., a Delaware corporation (“Veeco”), pursuant to which, subject to the terms and conditions set forth therein, Merger Sub will be merged with and into Veeco, with Veeco surviving such merger as a wholly owned subsidiary of Axcelis (the “Merger”). Axcelis now expects the Merger to close by the end of the first quarter of 2027 subject to the satisfaction or waiver of all closing conditions. There can be no assurances that the closing will occur on this timeline. The completion of the transactions contemplated by the Merger Agreement is subject to the satisfaction or waiver of customary closing conditions, including the pending regulatory approval from the State Administration for Market Regulation of the People’s Republic of China (“SAMR”). The parties continue to work constructively with SAMR to obtain clearance. In addition, due to the pending expiry of the current clearance under the Hart-Scott-Rodino Antitrust Improvements Act of 1976, as amended (the “HSR Act”), the parties plan to promptly make a new submission under the HSR Act. The closing is also conditioned upon the expiration or early termination of the HSR Act waiting period for this new submission.