Amtech Systems, Inc.

Item 5.02 Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangement of Certain Officers. Amtech Systems, Inc. (the “Company”) announced that on August 4, 2026, Robert C. Daigle notified the Board of Directors (the "Board") of the Company of his intention to retire as Chief Executive Officer of the Company, effective August 13, 2026. Mr. Daigle will continue to serve on the Board as Executive Chairman. Mr. Daigle's retirement is not the result of any disagreement with the Company relating to the Company's operations, policies, or practices. In connection with Mr. Daigle's transition to Executive Chairman, the Company entered into an Amended and Restated Employment Agreement (the “Executive Chair Agreement”) with Mr. Daigle. The Executive Chair Agreement provides for, among other things, a two-year term of employment, an annual base salary of $300,000, a grant of 50,000 restricted stock units ("RSUs") under the Company's 2022 Equity Incentive Plan, and certain change in control and severance protections. The RSUs were granted effective at the close of market on August 4, 2026, and vest ratably over a two-year period, subject to Mr. Daigle’s continued service with the Company through the applicable vesting dates and the terms of the applicable award agreement. The foregoing description of the Executive Chair Agreement is qualified in its entirety by reference to the Executive Chair Agreement, a copy of which will be filed as Exhibit 10.1 hereto and incorporated herein by reference. On August 4, 2026, the Board approved the appointment of Guy Shechter as Chief Executive Officer of the Company, effective as of August 13, 2026. In connection with such appointment, and upon the recommendation of the Compensation Committee, the Board approved a grant of 25,000 RSUs to Mr. Shechter under the Company's 2022 Equity Incentive Plan, as amended. The RSUs were granted effective at the close of market on August 4, 2026, and vest ratably over a three-year period, subject to Mr. Shechter's continued service with the Company through the applicable vesting dates and the terms of the applicable award agreement. In connection with his appointment as Chief Executive Officer, the Board appointed Mr. Shechter to the Board. Mr. Shechter will serve as a director until the Company's next annual meeting of stockholders and until his successor is duly elected and qualified, or until his earlier death, resignation or removal. Mr. Shechter, age 58, currently serves as the Company's President and Chief Operating Officer and will continue to serve as President following his appointment as Chief Executive Officer. Mr. Shechter was appointed President and Chief Operating Officer effective May 19, 2026. Prior to joining the Company, Mr. Shechter held leadership positions at Yield Engineering Systems from 2021 to 2026, most recently serving as Senior Vice President and General Manager. Prior to Yield Engineering Systems, he served in various leadership roles at Veeco Instruments from 2007 to 2020, including Vice President and General Manager, Global Services Solutions. Mr. Shechter holds an MBA and a Bachelor of Science degree in Mechanical Engineering from Technion-Israel Institute of Technology. There are no arrangements or understandings between Mr. Shechter and any other persons pursuant to which he was appointed Chief Executive Officer. There are no family relationships between Mr. Shechter and any director or executive officer of the Company, and there are no transactions requiring disclosure under Item 404(a) of Regulation S-K.