Axcelis Technologies, Inc.

Item 5.07 Submission of Matters to a Vote of Security Holders. As previously announced, on September 30, 2025, Axcelis Technologies, Inc., a Delaware corporation (“Axcelis” or the “Company”), entered into an Agreement and Plan of Merger (the “Merger Agreement”), by and among Axcelis, Victory Merger Sub, Inc., Delaware corporation and a direct wholly owned subsidiary of Axcelis (“Merger Sub”) and Veeco Instruments Inc., a Delaware corporation (“Veeco”), pursuant to which, subject to the terms and conditions set forth therein, Merger Sub will be merged with and into Veeco, with Veeco surviving such merger as a wholly owned subsidiary of Axcelis (the “Merger”). On February 6, 2026, Axcelis held a special meeting of stockholders (the “Special Meeting”) to consider certain proposals related to the Merger. All references in this Current Report on Form 8-K to “present in person” shall mean present at the Special Meeting either (i) virtually via the Internet or (ii) in person at Axcelis’ headquarter offices. As of the close of business on December 26, 2025, the record date for the Special Meeting, there were 30,699,201 shares of the Company’s common stock, par value $0.01 per share (the “Shares”), outstanding and entitled to vote at the Special Meeting. A total of 25,228,112 Shares, representing approximately 82.18% of the voting power of the outstanding Shares entitled to vote, were present in person or represented by proxy at the Special Meeting, constituting a quorum to conduct business. At the Special Meeting, the following proposals were considered: Share Issuance Proposal. A proposal to approve the issuance of shares of Axcelis common stock pursuant to the Merger Agreement (the “Share Issuance Proposal”). Adjournment Proposal. A proposal to approve the adjournment of the Special Meeting, if necessary or appropriate, to solicit additional proxies if there are insufficient votes to adopt the Share Issuance Proposal (the “Adjournment Proposal”). Each proposal is described in detail in the Company’s definitive proxy statement filed with the Securities and Exchange Commission on December 31, 2025, as supplemented on January 28, 2026 and February 2, 2026, respectively. The Share Issuance Proposal and the Adjournment Proposal were each approved by the requisite vote of the Company’s stockholders. The final voting results for each proposal are presented below. Proposal 1: The Share Issuance Proposal Approval of the Share Issuance Proposal required the affirmative vote of the holders of a majority of votes cast on the Share Issuance Proposal. Abstentions were not considered votes cast and therefore had no effect on the outcome of the Share Issuance Proposal. The Share Issuance Proposal was approved. For Against Abstain ─────────────────────────────────────────────────────────── 24,128,309 (95.84%) 1,048,205 (4.16%) 51,598 Proposal 2: The Adjournment Proposal Approval of the Adjournment Proposal required the affirmative vote of the holders of a majority of votes cast on the Adjournment Proposal. Abstentions were not considered votes cast and therefore had no effect on the outcome of the Adjournment Proposal. The Adjournment Proposal was approved, but was not necessary in light of the approval of the Share Issuance Proposal. For Against Abstain ─────────────────────────────────────────────────────────── 23,376,908 (92.86%) 1,796,454 (7.14%) 54,750 Because none of the proposals were “routine” matters, there could be no broker non-votes occurring in connection with these proposals at the Special Meeting.

Item 7.01. Regulation FD Disclosure. On February 6, 2026, the Company issued a press release announcing the results of the Special Meeting. A copy of the press release is attached hereto as Exhibit 99.1 and is incorporated herein by reference.