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BCS

Changes in Beneficial Ownership · 4

Axcelis Technologies, Inc.

ACLSNASDAQEQUITYCurrent

Changes in Beneficial Ownership

Filed Jun 16, 2026Accepted Jun 16, 2026, 5:05 PM EDTFiling CIK 1113232Accession 0001979418-26-000010
Share

Structured filing — 4

form4-06162026_050601.xml

Open full document ↗

Filing details

Report period
2026-06-15
Issuer
AXCELIS TECHNOLOGIES INC
Issuer CIK
0001113232
Trading symbol
ACLS

Reporting owner 1

Name
Blumenstock Gerald M
Reporting owner CIK
0001979418
Relationship
Officer
Officer title
EVP, Research, Dev. & Eng.
Address
C/O AXCELIS TECHNOLOGIES, INC., 108 CHERRY HILL DRIVE, BEVERLY, MA, 01915

Non-derivative transactions

Non-derivative transactions · 1 reported row
SecurityTransaction dateCodeAmountA / DPrice (USD)Owned afterOwnership
Common Stock2026-06-15F · Form 4506D[F1]191.60[F2]19,987[F3]D
Table key
F · Form 4
Securities delivered or withheld for exercise price or tax liability under Rule 16b-3
D
Direct

Footnotes

F1
This forfeiture of shares for tax withholding purposes relates to the vesting on June 15, 2026 of service vesting restricted stock units granted to the executive in June 2023. The shares issued to the executive following the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.↩ 1
F2
Represents the closing price of the common stock on the date of the tax withholding.↩ 1
F3
Of the shares held after this vesting event on June 15, 2026, 19,447 shares are issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.↩ 1

Signature 1

Signed
/s/ Eileen J. Evans, Attorney-in-Fact
Date
2026-06-16

Company context

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 45 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

Current securities

Recent company filings

  1. 10-Q filingNov 5, 2026
  2. SCHEDULE 13G/A - filed by FMR LLC regarding AXCELIS TECHNOLOGIES INCNov 5, 2026
  3. Results of Operations and Financial ConditionNov 5, 2026
  4. 425 filingNov 2, 2026
  5. Regulation FD Disclosure · Other EventsNov 2, 2026

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